Precision Linear and Rotary Axes for SEM and TEM

Transmission Electron Microscopes (TEM) and Scanning Electron Microscopes (SEM) require high-precision rotary and linear axes that operate both inside and outside high-vacuum environments. Preferably, a single encoder type could be used throughout the system to make integration less complicated for the manufacturer.

The Solution

The patented PurePrecision optical technology of Celera Motion Mercury series encoders leads to the most compact sensors in their performance class, and are designed so that the same sensors can be paired with either rotary or linear glass gratings (scales). Several Celera Motion encoders are available in both high-vacuum versions and atmospheric versions that are vented and constructed with vacuum compatible materials designed with a 10-8 Torr vacuum rating. In this case, the M2000 and vacuum-rated equivalent M2000V sensors were selected for their high resolution, small size and digital signal output.

PurePrecision optical technology

The Benefit

While the compact design considerably reduces the size and mass of each axis, the low power consumption of the M2000V design aids the thermal suitability in the vacuum. M2000/M2000V kit encoders are smaller, faster to install, easier to set up, and they also deliver higher performance; they align better than any other encoder. The compact sensor fits into very tight spaces and functions in both rotary and linear applications. The M2000V sensor is vented, constructed with vacuum compatible materials, and designed for a 48 hour bake out at 150 °C. Color-coded bare leads are offered for customer termination at their vacuum chamber feed-thru.

M2000/M2000V kit encoders


. .
Sensor Dimensions 20.6 x 12.7 x 8.4 mm
Interface Digital A-quad-B with index
Grating Period 20 µm
System Resolution 5 µm to 78 nm
Maximum Speed 7.2 m/sec
Sensor Weight 2.7 g
Travel Required Various linear and rotary
Power dissipation in head 100 mW typical


This information has been sourced, reviewed and adapted from materials provided by Celera Motion.

For more information on this source, please visit Celera Motion.


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