Octiv Mono 2.0 - An RF Wattmeter and Directional Power Sensor

The Octiv Mono 2.0  from Impedans Ltd is a through-line RF Wattmeter, directional power sensor, and impedance analyzer. It is designed to measure a single basic frequency and delivers a NIST traceable full-scale accuracy of 1%.

The Octiv Mono 2.0 can measure forward power, absorbed power, reflected power, complex impedance, and VSWR. It can be connected directly to a PC through USB or over the network.

Features

  • Multiple frequency calibration
  • Interchangeable connectors
  • Pulsed RF functionality
  • Wide power range

Applications

  • Transmission line mismatch identification
  • RF subsystem health indexing
  • Generator output verification
  • Match network characterization

RF Wattmeter and Directional Power Sensor

Image Credit: Impedans Ltd

Overview

The Octiv Mono 2.0 is a precision RF Wattmeter used in several laboratory applications. It works to a true accuracy of 1% and is resistant to harmonics. These features make it the most reliable power sensor for applications such as semiconductor manufacturing.

The Octiv Mono 2.0 is calibrated to five standard frequencies based on customers’ choice, for instance:

  • 2 MHz
  • 13.56 MHz
  • 27.12 MHz
  • 40.68 MHz
  • 60 MHz

Users can select each frequency through a dropdown menu. The sensor features an output power range of 100 mW* to 12 kW*.

*Customizable to users’ needs

The RF wattmeter technology assists in solving problems related to tool matching, poor production yields, and fault detection. It helps to establish precise process windows and also ascertains the health of power subsystems and “process run to run” stability. It offers users the assurance to trust the accuracy of the most complicated process input and RF power delivery.

RF Parameters Measured

  • Forward power
  • Real power
  • Impedance
  • Reflected power

Measurement Functionality

Time-Averaged Measurements

This offers an average over time of the RF power measurements needed.

Time-Resolved Measurements

Measurements can be synchronized with an external synchronization signal. Users can then acquire comprehensive information on the power distribution as a function of time or phase in the synchronization pulse period. The pulse period is usually on a timescale of milliseconds to microseconds.

Time-Trend Measurements

Time-trend measurements enable users to get information on the changes in power as time progresses via a specific process. This feature does not need external synchronization, and the timescales involved can vary from seconds to hours.

Smith Chart Measurements

The load impedance can be monitored as it is presented on a Smith Chart, and impedance variations can be tracked during the process cycle.

RF Wattmeter and Directional Power Sensor

Image Credit: Impedans Ltd

Features

Probe

Compact design

The Octiv Mono 2.0 is compact and can be easily installed. It is placed between the generator and the match unit to offer the exact measurement of the RF delivery into the plasma chamber.

Octiv Mono 2.0 pulsed power measurement

The Octiv Mono 2.0 quantifies the pulsed power time profile at microsecond resolution while ensuring a very high degree of accuracy (1%). This wattmeter measures a single frequency at a time. Users can choose their required frequency to examine from a dropdown menu of five frequencies, or alternatively, they can request five specific frequencies when placing the order. The Octiv Mono 2.0 is calibrated at Impedans' Advanced RF Calibration Laboratory called Lab RFx, to five standard fundamental frequencies: 2, 13.56, 27.12, 40.68 and 60 Mhz.

Impedans Lab RFx

Image Credit: Impedans Ltd

Meter view

Process parameters can be viewed as they are obtained by the sensor. This feature offers a practical way of tracking RF power delivery during the setup and installation of process hardware. For analysis, data can be recorded to a file.

Smith Chart view

The load impedance can be monitored as it is shown on a Smith Chart, and impedance differences can be tracked during the process cycle.

Time Trend view

The Time Trend view can be used to track each RF parameter in real-time. Time-series data can be visualized as it is obtained. An overview of each parameter can be acquired during the process cycle, and run-to-run and chamber-to-chamber differences can be monitored.

Software

Frequency Agility

The Octiv Mono 2.0 enables users to accurately quantify the RF parameters while monitoring a rapidly varying basic frequency. For instance, in variable frequency tweaking to match the plasma.

Software Application Programmers Interface (API)

The sensor comes with an all-inclusive API to enable integration with third-party software applications. Sensor initialization, configuration, as well as data transfer functions,  are effortlessly executed on all of the standard software platforms.

Communications Interface

USB 2.0 is the standard Octiv Mono 2.0 communications interface, offering power to the sensor and supporting sensor configuration and data transfer operations in a laboratory setting. To facilitate integration with industrial equipment and manufacturing automation systems, alternative communications interfaces are provided that are based on Ethernet or RS-232. Electrical isolation guarantees consistent data transfer even in RF environments.

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