The SFM5xxx mass flow meter series is based on the microthermal measurement principle and uses Sensirion’s proven CMOSens® Technology. It offers best-in-class performance and excellent reliability, which, unlike most other devices on the market, does not drift or require in-service re-calibration.
The SFM5xxx series covers multiple flow ranges in a single device, from low and ultra-low (down to 50 sccm full-scale flow) to high gas flows.
Coupled with multi-gas calibration and exchangeable fittings, these are the first mass flow meters on the market available as standard off-the-shelf products suitable for applications in medical, analytical, and industrial sectors.
Learn more about the SFM5xxx on our website.
Download the datasheet here.