The Entegris InVue® GV148 Liquid Concentration Monitor provides real-time, non-intrusive measurements of process fluid concentration—ideal for chemical blending, spiking, and dilution applications.
Housed in a compact, ultra-high-purity package, the GV148 offers cost-effective, high-performance monitoring that supports greater efficiency across front-end-of-line (FEOL), back-end-of-line (BEOL), and sub-fab chemical delivery systems.
By delivering increased visibility into process conditions, the GV148 helps enable tighter process control, higher wafer throughput, reduced chemical consumption, and less scrap.
The in-line sensor precisely measures the fluid’s index of refraction (IoR) and temperature to calculate concentration. It's especially well-suited for monitoring hydrogen peroxide concentration in CMP slurries. An optional automatic window cleaning feature is also available to support long-term reliability.