Pentagon Technologies’ QIII+® can dramatically reduce PM recovery time, green-to-green time, and increase the overall throughput of the fab.
Using the QIII+®, you can immediately detect particles to 0.3 micron and localize them within a production tool. This proactive approach to PM cycles will result in savings of up to 30% on PM times and a reduction in particle adders by 50% or more. The result of starting clean is first-time recovery with dramatically lower adders at all particle sizes making your process tools significantly more productive.
- Predictable, first time tool recovery, every time
- Reduce recovery time by 25-50%
- Reduce seasoning and test wafers
- Reduce pump-purge cycles
- Increase MTBC by 4x or more
- Increase tool availability
- Reduce PM cycle time
- Reduce troubleshooting events