Posted in | Particle Detectors

Particle Detector from Pentagon Technologies

Pentagon Technologies’ QIII+® can dramatically reduce PM recovery time, green-to-green time, and increase the overall throughput of the fab.

Using the QIII+®, you can immediately detect particles to 0.3 micron and localize them within a production tool. This proactive approach to PM cycles will result in savings of up to 30% on PM times and a reduction in particle adders by 50% or more. The result of starting clean is first-time recovery with dramatically lower adders at all particle sizes making your process tools significantly more productive.


  • Predictable, first time tool recovery, every time
  • Reduce recovery time by 25-50%
  • Reduce seasoning and test wafers
  • Reduce pump-purge cycles
  • Increase MTBC by 4x or more
  • Increase tool availability
  • Reduce PM cycle time
  • Reduce troubleshooting events

Other Equipment

While we only use edited and approved content for Azthena answers, it may on occasions provide incorrect responses. Please confirm any data provided with the related suppliers or authors. We do not provide medical advice, if you search for medical information you must always consult a medical professional before acting on any information provided.

Your questions, but not your email details will be shared with OpenAI and retained for 30 days in accordance with their privacy principles.

Please do not ask questions that use sensitive or confidential information.

Read the full Terms & Conditions.