Posted in | Particle Detectors

Automated Particle Detection from Dr. Schenk GmbH

The automated Particle Detection System of Dr. Schenk. Pollux enables fabs to perform a complete inspection on each reticle prior to its use. This approach provides a more cost-effective and more reliable solution than the method of visual inspection.


  • Reticle Stockers
  • Wafer Steppers
  • Cleaning Stations
  • Automatic Handling Systems
  • Stand-Alone Unit with manual loading


  • Cost-Effectiveness
  • Easy Operation
  • High Speed
  • Low Maintenance

Other Equipment