The automated Particle Detection System of Dr. Schenk. Pollux enables fabs to perform a complete inspection on each reticle prior to its use. This approach provides a more cost-effective and more reliable solution than the method of visual inspection.
Applications
- Reticle Stockers
- Wafer Steppers
- Cleaning Stations
- Automatic Handling Systems
- Stand-Alone Unit with manual loading
Benefits
- Cost-Effectiveness
- Easy Operation
- High Speed
- Low Maintenance