CyberOptics® Corporation, a leading global developer and manufacturer of high precision 3D sensing technology solutions, will present and exhibit at The 23rd Symposium on Photomask and NGL Mask Technology in Yokohama, Japan, 6-8 April 2016.
A poster presentation on Tuesday, April 7, from 17:10-19:00 will feature Mr. Yukinobu Hayashi, Field Application Engineer for CyberOptics, discussing “Best practices for monitoring humidity in immersion scanner reticle environments to reduce reticle haze effects.”
“It is critical to effectively monitor RH in immersion scanners as adverse effects can result from haze when proper measures are not taken to measure and control it,” said Hayashi-san.
CyberOptics’ ReticleSense® Auto Multi Sensor (AMSR) can measure humidity in all locations of the reticle environment and detect any place where H2O is exposed to the reticle. Monitoring humidity is critical in reducing reticle haze. Haze is an adverse effect on reticles caused by a combination of mask residue, 193nm light and H2O. In addition to RH measurement, the AMSR can also be used for vibration and leveling – all important factors for increasing yield and reducing downtime.
About the WaferSense and ReticleSense Line
The WaferSense measurement portfolio including the Auto Leveling System (ALS), the Auto Gapping System (AGS), the Auto Vibration System (AVS), the Auto Teaching System (ATS) and the Airborne Particle Sensor (APS) are available now in 200mm, 300mm and 450mm wafer sizes. Additionally, both APS and ALS are available in 150mm sizes. The ReticleSense Airborne Particle Sensor (APSR), the ReticleSense Auto Leveling System (ALSR) and the new ReticleSense Airborne Particle Sensor Quartz (APSRQ) are available in a reticle shaped form factor. For more information about the entire line of CyberOptics solutions, please visit the company’s website at www.cyberoptics.com.
CyberOptics Corporation (NASDAQ: CYBE) is a leading global developer and manufacturer of high precision sensing technology solutions. CyberOptics sensors are being used in general purpose metrology and 3D scanning, surface mount technology (SMT) and semiconductor markets to significantly improve yields and productivity. By leveraging its leading edge technologies, the company has strategically established itself as a global leader in high precision 3D sensors, allowing CyberOptics to further increase its penetration of its key vertical segments. Headquartered in Minneapolis, Minnesota, CyberOptics conducts worldwide operations through its facilities in North America, Asia and Europe.