Sensirion's New SFM3000 Low-Pressure-Drop Flow Meter

SFM3000 mass flow meter for high-volume applications in medical devices, process automation and burner control. The flow channel is designed to achieve a very low pressure drop of less than 3mbar through the sensor element.

The flow meter bi-directionally measures the flow of air and other non-aggressive gases at rates up to 200slm with high accuracy and very high speed. It outputs a 14-bit digital signal at a 2kHz update rate. The signal is internally linearized and temperature compensated. Furthermore, the new mass flow meter operates from a 5Vdc supply voltage and features a digital 2-wire interface, making it easy to connect directly to a microcontroller.

Sensirion Mass Flow Meter SFM3000.


The outstanding performance of the SFM3000 gas flow sensor is based on Sensirion’s patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. Gas flow is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to the proven CMOSens® technology, the flow meter is suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications in medical ventilation and anaesthesia, as well as process automation and burner control.

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