Posted in | Pressure Sensors

OEM Sensor with High Volume, Small Package Applications – 7000 Series

Overview

Features

Type Absolute, gage, differential and vacuum
Range 15 to 500 psi (1 to 34.5 bar; 103 to 3,447 KPa)
Media Clean, dry air and non-corrosive gases
Flexibility Sensitivity, resistance, bridge, constraint, etc.
Shipping Wafers on tape

 

Benefits

Cost Due to high-performing die, money is saved over time
Performance Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Speed Get to market quickly with flexible and creative solutions
Security Feel confident doing business with a qualified company supported by a solid parent company (NASDAQ: MMSI)
Service Experience swift, professional and personal support

 

Applications

For over two decades, Merit Sensor Systems has assisted customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for industrial, automotive, defense, aviation, medical and consumer applications.

Merit Sensor offers comprehensive service design capabilities, piezoresistive technology (PRT), packaging and assembly, flexible shipping, in-house wafer fabrication, complete pressure measurement (absolute, differential, gage, and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (-40 °C to 150 °C) via Merit Sensor’s Sentium® process. Also, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.

Compared to other pressure sensor suppliers, Merit Sensor can offer customers totally custom-made pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for highly stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.

At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.

Specifications

Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation   5 15 V Maximum: 3 mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Performance
Offset -10 0 10 mV/V Zero pressure; gage only; @25 °C
Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25 °C
Pressure Hysteresis -0.1 0 0.1 % FSO @25 °C
Temp Coeff – Zero -25 0 25 µV/V/°C -40 °C to 150 °C
Temp Coeff – Resistance 2300 2800 3300 PPM/°C -40 °C to 150 °C
Temp Coeff – Sensitivity -1500 -2200 -2500 PPM/°C -40 °C to 150 °C
Thermal Hysteresis -0.1 0 0.1 % FSO Zero pressure
Long-Term Stability -0.1 0 0.1 % FSO  
Burst Pressure 3X       Full scale pressure
Full-Scale Output (@ 5 volts) Other outputs available upon request
15 psi (1 bar; 103 KPa) 60 75 90 mV  
50 psi (3.4 bar; 345 KPa) 100 125 150 mV  
100 psi (6.9 bar 689 KPa) 120 150 180 mV  
300 psi (20.7 bar 2,068 KPa) 120 150 180 mV  
500 psi (34.5 bar; 3,447 KPa) 140 175 210 mV  

 

Part Details

Dimensions (millimeters, post-cut)

Standard Bond Pad Metallization = Aluminum.

Absolute also; other contraints available.

Electrical

Part Number Configurator

Example: 7SO-0300-9T offers 5kohm Impedance, Open Bridge, 100 psi and Gage Constraint.

Standard Part Numbers

. .
7SO-1000-5T 8SO-1000-5T
7SO-0500-5T 8SO-0500-5T
7SO-0300-5T 8SO-0300-5T
7SO-0100-5T 8SO-0100-5T
7SO-0070-5T 8SO-0070-5T
7SO-1000-9T 8SO-1000-9T
7SO-0500-9T 8SO-0500-9T
7SO-0300-9T 8SO-0300-9T
7SO-0100-9T 8SO-0100-9T
7SO-0070-9T 8SO-0070-9T
7SH-1000-5T 8SH-1000-5T
7SH-0500-5T 8SH-0500-5T
7SH-0300-5T 8SH-0300-5T
7SH-0100-5T 8SH-0100-5T
7SH-0070-5T 8SH-0070-5T
7SH-1000-9T 8SH-1000-9T
7SH-0500-9T 8SH-0500-9T
7SH-0300-9T 8SH-0300-9T
7SH-0100-9T 8SH-0100-9T
7SH-0070-9T 8SH-0070-9T
7SC-1000-5T 8SC-1000-5T
7SC-0500-5T 8SC-0500-5T
7SC-0300-5T 8SC-0300-5T
7SC-0100-5T 8SC-0100-5T
7SC-0070-5T 8SC-0070-5T
7SC-1000-9T 8SC-1000-9T
7SC-0500-9T 8SC-0500-9T
7SC-0300-9T 8SC-0300-9T
7SC-0100-9T 8SC-0100-9T
7SC-0070-9T 8SC-0070-9T

Note: “T” in part number = sawn wafer on tape in metal frame.

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