For over two decades, Merit Sensor Systems has assisted customers to design, fabricate, assemble and package reliable, cost-effective piezoresistive pressure sensor solutions for industrial, automotive, defense, aviation, medical and consumer applications.
Merit Sensor offers comprehensive service design capabilities, piezoresistive technology (PRT), packaging and assembly, flexible shipping, in-house wafer fabrication, complete pressure measurement (absolute, differential, gage, and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (-40 °C to 150 °C) via Merit Sensor’s Sentium® process. Also, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.
Compared to other pressure sensor suppliers, Merit Sensor can offer customers totally custom-made pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for highly stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.
At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.
Features
| Type |
Absolute, gage, differential and vacuum |
| Range |
15 to 500 psi (1 to 34.5 bar; 103 to 3,447 KPa) |
| Media |
Clean, dry air and non-corrosive gases |
| Flexibility |
Sensitivity, resistance, bridge, constraint, etc. |
| Shipping |
Wafers on tape |
Benefits
| Cost |
Due to high-performing die, money is saved over time |
| Performance |
Enjoy best-in-class performance due to Merit’s proprietary Sentium technology |
| Speed |
Get to market quickly with flexible and creative solutions |
| Security |
Feel confident doing business with a qualified company supported by a solid parent company (NASDAQ: MMSI) |
| Service |
Experience swift, professional and personal support |
Specifications
| Parameter |
Minimum |
Typical |
Maximum |
Units |
Notes |
| Electrical & Environmental |
| Excitation |
|
5 |
15 |
V |
Maximum: 3 mA |
| Impedance |
4000 |
5000 |
6000 |
Ω |
Optional: 3,500 +/- 500 |
| Operating Temperature |
-40 |
|
150 |
°C |
Sentium® technology |
| Storage Temperature |
-55 |
|
160 |
°C |
|
| Performance |
| Offset |
-10 |
0 |
10 |
mV/V |
Zero pressure; gage only; @25 °C |
| Non-linearity |
-0.2 |
0 |
0.2 |
% FSO |
Best Fit Straight Line; @25 °C |
| Pressure Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
@25 °C |
| Temp Coeff – Zero |
-25 |
0 |
25 |
µV/V/°C |
-40 °C to 150 °C |
| Temp Coeff – Resistance |
2300 |
2800 |
3300 |
PPM/°C |
-40 °C to 150 °C |
| Temp Coeff – Sensitivity |
-1500 |
-2200 |
-2500 |
PPM/°C |
-40 °C to 150 °C |
| Thermal Hysteresis |
-0.1 |
0 |
0.1 |
% FSO |
Zero pressure |
| Long-Term Stability |
-0.1 |
0 |
0.1 |
% FSO |
|
| Burst Pressure |
3X |
|
|
|
Full scale pressure |
| Full-Scale Output (@ 5 volts) Other outputs available upon request |
| 15 psi (1 bar; 103 KPa) |
60 |
75 |
90 |
mV |
|
| 50 psi (3.4 bar; 345 KPa) |
100 |
125 |
150 |
mV |
|
| 100 psi (6.9 bar 689 KPa) |
120 |
150 |
180 |
mV |
|
| 300 psi (20.7 bar 2,068 KPa) |
120 |
150 |
180 |
mV |
|
| 500 psi (34.5 bar; 3,447 KPa) |
140 |
175 |
210 |
mV |
|
MEMS Pressure Elements Applications
Part Details
Dimensions (millimeters, post-cut)
Standard Bond Pad Metallization = Aluminum.
Absolute also; other constraints available.
Electrical
Part Number Configurator
7SO-0300-9T offers 5kohm Impedance, Open Bridge, 100 psi and Gage Constraint.
Standard Part Numbers
| . |
. |
| 7SO-1000-5T |
8SO-1000-5T |
| 7SO-0500-5T |
8SO-0500-5T |
| 7SO-0300-5T |
8SO-0300-5T |
| 7SO-0100-5T |
8SO-0100-5T |
| 7SO-0070-5T |
8SO-0070-5T |
| 7SO-1000-9T |
8SO-1000-9T |
| 7SO-0500-9T |
8SO-0500-9T |
| 7SO-0300-9T |
8SO-0300-9T |
| 7SO-0100-9T |
8SO-0100-9T |
| 7SO-0070-9T |
8SO-0070-9T |
| 7SH-1000-5T |
8SH-1000-5T |
| 7SH-0500-5T |
8SH-0500-5T |
| 7SH-0300-5T |
8SH-0300-5T |
| 7SH-0100-5T |
8SH-0100-5T |
| 7SH-0070-5T |
8SH-0070-5T |
| 7SH-1000-9T |
8SH-1000-9T |
| 7SH-0500-9T |
8SH-0500-9T |
| 7SH-0300-9T |
8SH-0300-9T |
| 7SH-0100-9T |
8SH-0100-9T |
| 7SH-0070-9T |
8SH-0070-9T |
| 7SC-1000-5T |
8SC-1000-5T |
| 7SC-0500-5T |
8SC-0500-5T |
| 7SC-0300-5T |
8SC-0300-5T |
| 7SC-0100-5T |
8SC-0100-5T |
| 7SC-0070-5T |
8SC-0070-5T |
| 7SC-1000-9T |
8SC-1000-9T |
| 7SC-0500-9T |
8SC-0500-9T |
| 7SC-0300-9T |
8SC-0300-9T |
| 7SC-0100-9T |
8SC-0100-9T |
| 7SC-0070-9T |
8SC-0070-9T |
Note: “T” in part number = sawn wafer on tape in metal frame.