Posted in | Pressure Sensors

Low Pressure Sensor for High Volumes – J Series

For over 20 years Merit Sensor Systems has partnered with customers to design, fabricate, assemble and package reliable, economical piezoresistive pressure sensor solutions for automotive, industrial, defense, medical, aviation and consumer applications.

Merit Sensor offers full-service design capabilities, piezoresistive technology (PRT), in-house wafer fabrication, packaging and assembly, flexible shipping, complete pressure measurement (absolute, differential, gage and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (- 40 °C to 150 °C) via Merit Sensor’s Sentium® process. Furthermore, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.

In contrast to other pressure sensor suppliers, Merit Sensor can offer customers totally customized pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for extremely stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.

At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.


. .
Media Clean, dry air and non-corrosive gases
Range 3 to 300 psi (0.21 to 21 bar; 21 to 2100 KPa)
Type Absolute, gage, differential and vacuum
Flexibility Sensitivity, resistance, bridge, constraint, etc.
Shipping Wafers on tape, waffle pack



. .
Performance Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Security Feel confident doing business with an experienced company supported by a solid parent company (NASDAQ: MMSI)
Speed Get to market quickly with 1 single geometry that supports a wide pressure range (3 to 300 psi and up to 1000 psi optional)
Cost Due to high-performing die, money is saved over time
Service Experience quick, professional and personal support


Specifications (Preliminary)

Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation   1.5   mA Maximum: 3 mA
Impedance 4000 5000 6000 Ω Optional: 3,500 ± 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Offset -5 0 5 mV/V Zero pressure; gage only; @25 °C
Non-linearity -0.15 0 0.15 % FSO Best Fit Straight Line; @25 °C
Pressure Hysteresis -0.1 0 0.1 % FSO @25 °C
Temp Coeff – Zero -25 0 25 µV/V/°C -40 °C to 150 °C
Temp Coeff – Resistance 2500 3000 3500 PPM/°C -40 °C to 150 °C
Temp Coeff – Sensitivity -1500 -2000 -2500 PPM/°C -40 °C to 150 °C
Thermal Hysteresis -0.2 0 0.2 % FSO Zero pressure -40 °C to 150 °C
Long-Term Stability -0.2 0 0.2 % FSO Zero pressure
Burst Pressure 5X       Full scale pressure
Full-Scale Output (@ 1.5 mA excitation)
3 psi (0.21 bar; 21 kPa) 95 120 145 mV Other outputs available upon request
5 psi (0.34 bar; 34 kPa) 95 120 145 mV
15 psi (1 bar; 103 kPa) 95 120 145 mV
30 psi (2 bar; 207 kPa) 95 120 145 mV
50 psi (3.5 bar; 345 kPa) 95 120 145 mV
100 psi (7 bar; 670 kPa) 95 120 145 mV
150 psi (10 bar; 1035 kPa) 95 120 145 mV
300 psi (21 bar; 2070 kPa) 95 120 145 mV


MEMS Pressure Elements Applications

Part Details

Dimensions (millimeters, post-cut)


Other Equipment by this Supplier

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