Posted in | Pressure Sensors

OEM Sensor for Harsh Media – HM Series

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For over 20 years Merit Sensor Systems has partnered with customers to design, fabricate, assemble and package reliable, economical piezoresistive pressure sensor solutions for automotive, industrial, defense, medical, aviation and consumer applications.

Merit Sensor provides full-service design capabilities, flexible shipping, piezoresistive technology (PRT), in-house wafer fabrication, packaging and assembly, complete pressure measurement (absolute, gage, differential and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (-40 °C to 150 °C) via Merit Sensor’s Sentium^® process. Furthermore, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.

In contrast to other pressure sensor suppliers, Merit Sensor can offer customers totally customized pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for extremely stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.

At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.

Features

.	.
Type	Absolute; pressurized from cavity side
Range	15 to 500 psi (1 to 34.5 bar; 100 to 3,447 KPa)
Media	Air, liquids, and gasses that are compatible with glass and silicon (backside measurement)
Flexibility	Sensitivity, bridge, resistance, constraint, etc.
Shipping	Wafers on tape
Qualification	AEC-Q100

Benefits

.	.
Cost	Due to high-performing die, money is saved over time
Performance	Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Speed	Get to market quickly with flexible and creative solutions
Security	Feel confident doing business with a qualified company supported by a solid parent company (NASDAQ: MMSI)
Service	Experience prompt, professional and personal support

Specifications

Parameter	Minimum	Typical	Maximum	Units	Notes
Electrical & Environmental
Excitation		5	15	V	Maximum: 3 mA
Impedance	4000	5000	6000	Ω	Optional: 3,500 +/- 500
Operating Temperature	-40		150	°C	Sentium^® technology
Storage Temperature	-55		160	°C
Performance
Offset	-10	0	10	mV/V	Zero pressure; gage only; @25 °C
Non-linearity	-0.2	0	0.2	% FSO	Best Fit Straight Line; @25 °C
Pressure Hysteresis	-0.1	0	0.1	% FSO	@25 °C
Temp Coeff – Zero	-25	0	25	µV/V/°C	-40 °C to 150 °C
Temp Coeff – Resistance	2300	2800	3300	PPM/°C	-40 °C to 150 °C
Temp Coeff – Sensitivity	-1500	-2200	-2500	PPM/°C	-40 °C to 150 °C
Long-Term Stability	-0.2	0	0.2	% FSO
Burst Pressure	5X				Full scale pressure
Burst Pressure (500 psi part)	1500			psi
Full-Scale Output (@ 5 volts) Other outputs available upon request
100 psi (6.9 bar; 689 KPa)	120	150	180	mV
300 psi (20.7 bar 2,068 KPa)	110	135	160	mV
500 psi (34.5 bar 3,447 KPa)	140	175	210	mV