Posted in | Pressure Sensors

OEM Sensor for Harsh Media – HM Series

For over 20 years Merit Sensor Systems has partnered with customers to design, fabricate, assemble and package reliable, economical piezoresistive pressure sensor solutions for automotive, industrial, defense, medical, aviation and consumer applications.

Merit Sensor provides full-service design capabilities, flexible shipping, piezoresistive technology (PRT), in-house wafer fabrication, packaging and assembly, complete pressure measurement (absolute, gage, differential and vacuum) expansive pressure ranges (0.15 psi to 15,000 psi), and unsurpassed operating temperature range (-40 °C to 150 °C) via Merit Sensor’s Sentium® process. Furthermore, Merit Sensor is able to provide unparalleled flexibility to tailor pressure sensing solutions to match customers’ applications.

In contrast to other pressure sensor suppliers, Merit Sensor can offer customers totally customized pressure sensor designs with large or smaller/limited production runs. Merit Sensor’s customers range from pressure sensor transducer manufacturers who are already experts in pressure sensing technology and depend on Merit Sensor for extremely stable and sensitive MEMS sensing elements (bare die), to customers who have limited to no experience in the pressure sensing world and seek Merit Sensor to assist with a totally custom design and implementation of a pressure sensor that ideally fits their application.

At Merit Sensor, Engineers are application experts. They are ready to assist customers design the application to work with a pressure sensor, and/or design a tailored pressure sensing solution that suits a specific application. In case a customer is unsure whether a pressure sensor is right for a particular application, Merit Sensor can help make that choice.

Features

. .
Type Absolute; pressurized from cavity side
Range 15 to 500 psi (1 to 34.5 bar; 100 to 3,447 KPa)
Media Air, liquids, and gasses that are compatible with glass and silicon (backside measurement)
Flexibility Sensitivity, bridge, resistance, constraint, etc.
Shipping Wafers on tape
Qualification AEC-Q100

 

Benefits

. .
Cost Due to high-performing die, money is saved over time
Performance Enjoy best-in-class performance due to Merit’s proprietary Sentium technology
Speed Get to market quickly with flexible and creative solutions
Security Feel confident doing business with a qualified company supported by a solid parent company (NASDAQ: MMSI)
Service Experience prompt, professional and personal support

 

Specifications

Parameter Minimum Typical Maximum Units Notes
Electrical & Environmental
Excitation   5 15 V Maximum: 3 mA
Impedance 4000 5000 6000 Ω Optional: 3,500 +/- 500
Operating Temperature -40   150 °C Sentium® technology
Storage Temperature -55   160 °C  
Performance
Offset -10 0 10 mV/V Zero pressure; gage only; @25 °C
Non-linearity -0.2 0 0.2 % FSO Best Fit Straight Line; @25 °C
Pressure Hysteresis -0.1 0 0.1 % FSO @25 °C
Temp Coeff – Zero -25 0 25 µV/V/°C -40 °C to 150 °C
Temp Coeff – Resistance 2300 2800 3300 PPM/°C -40 °C to 150 °C
Temp Coeff – Sensitivity -1500 -2200 -2500 PPM/°C -40 °C to 150 °C
Long-Term Stability -0.2 0 0.2 % FSO  
Burst Pressure 5X       Full scale pressure
Burst Pressure (500 psi part) 1500     psi  
Full-Scale Output (@ 5 volts) Other outputs available upon request
100 psi (6.9 bar; 689 KPa) 120 150 180 mV  
300 psi (20.7 bar 2,068 KPa) 110 135 160 mV  
500 psi (34.5 bar 3,447 KPa) 140 175 210 mV  

 

MEMS Pressure Elements Applications

Part Details

Dimensions (millimeters, post-cut)

Side View

Side View

 

Electrical

Part Number Configurator

Standard Part Numbers

  • H1T-0300-L2T
  • H1C-0300-L2T
  • H1T-0090-L2T
  • H1C-0090-L2T
  • H1T-0070-L2T
  • H1C-0070-L2T

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