Posted in | Pressure Sensor

SMI Provides Calibrated Ultra-Low Gauge Pressure Sensor Delivering Industry-Leading Accuracy

Silicon Microstructures (SMI), Inc. launches the SM923X Series of ultra-low pressure sensor systems. With the SM923X Series, SMI broadens the limit of ultra-low gauge pressure sensing to as low as 250 Pa (1 in H2O). The fully temperature compensated and pressure calibrated sensor allows precise pressure sensing in HVAC, industrial, and medical applications. Industry-leading output accuracy (1% FS) and long-term stability is accomplished by integrating SMI’s proprietary MEMS pressure transducer with a high-tech signal-conditioning IC in a single package.

The SM923X Series was designed to match the tough reliability requirements of the HVAC, industrial, and medical applications. SMI’s compact solution swaps traditional bulky and expensive equipment and the SM923X series enhances system efficiency with reliability and accurate performance. The total accuracy error after board mount and system level autozero is below 1% full scale over the whole compensated temperature range. The 16-bit resolution delivers the ability to resolve signals as small as 0.0038 Pa. The exceptional warm-up behavior and long-term stability additionally assure its projected performance over the part’s service life.

Easy system integration

The SM923X sensors are completely calibrated and set for immediate use. The digital I2C Interface facilitates easy system integration. A deep sleep mode allows new customer applications such as wireless sensing for HVAC. The SMI solution incorporates high order noise filtering and delivers low noise and very low EMI susceptibility. The small SO16 package with dual vertical port enables effortless system integration and pressure connection, while the MEMS sensor itself is powerful having high burst pressure. Execution is further streamlined by the sensor’s resistance to mounting orientation and vibrations.

The gauge pressure sensor system can be ordered in three configurations: SM9233 (0 to +250 Pa/0 to 1 in H2O), SM9235 (0 to +300 Pa/0 to 1.2 in H2O) and SM9236 (0 to +600 Pa/0 to 2.4 in H2O). The devices are ready for customer sampling and are out for volume production.

Key applications: Pressure switches, VAV, and respiratory devices

The SM923X Series enables accurate pressure sensing in industrial control systems such as pressure switches and pneumatic valves by, for example, sensing a leakage. Another application is to quantify gas pressure in vacuum pumps. In HVAC equipment, pressure sensors are employed for both filter monitoring and VAV control. With the aid of SMI’s solution, air can be dispersed in smarter ways and thus facilitate energy savings.

In medical applications, ultra-low gauge pressure sensors are utilized to establish suction pressure and ventilation pressure in, for example, respiration devices. The incorporation and use in breathing equipment are eased by the sensor’s insensitivity to the mounting orientation, its low noise performance, and high resolution.

The SM923X Series matches SMI’s ultra-low pressure sensor portfolio with a solution for gauge pressure.

Decades of experience in low-pressure sensing are reflected in the SM9000 Family. The SM923X Series completes SMI’s solutions offering on the low-pressure side and puts us at the forefront of the market with the lowest available pressure range, with the respectively highest accuracy. We are excited to see how customers can increase efficiency on the system level by utilizing our sensors.

Mike Klitzke, VP of Research and Development and Business Development, SMI

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