Fast Steering Mirrors (FSM) from Micro-Epsilon are miniaturized tilting mirrors used to accurately deflect light or laser beams. The FSM3000 models combine high precision and dynamism. They are easy to incorporate and extremely durable, which is why they are used, among other things, for satellite communication in space.
A strong voice-coil actuator with high-resolution integrated coil eddy current sensors provides ultra-precise movements with a wide tilt angle. High-quality mirrors help the FSM satisfy the most stringent optical standards. Series-optimized for large quantities – perfect for use in industry, optics, aerospace, and defense.
Large Tilt Angle with High Dynamism
Image Credit: Micro-Epsilon
Micro-Epsilon's Fast Steering Mirrors use novel voice-coil technology to achieve a maximum frequency of 2 kHz, equivalent to piezo-controlled systems but far more robust. As a result, they react extraordinarily fast, making them perfect for dynamic applications. The mirror's ±1.5° range of motion provides flexibility and additional degrees of freedom without sacrificing precision.
Maximum Precision in Two Axes (Tip/Tilt)
Image Credit: Micro-Epsilon
The Fast Steering Mirror can be accurately controlled in both axes. Four integrated eddy current sensors continually measure the mirror's location, while four actuator coils accurately move it. Two opposing sensors and actuators define a measurement and rotation axis. A central point of rotation enables backlash-free, wear-free, and coordinated movement, as well as optimum precision and dynamism while in operation.
Intelligent System Design – Easy to Integrate
Image Credit: Micro-Epsilon
The FSM3000 tilting mirrors are easy to install mechanically and electrically. In addition to its tiny size and light weight, the sensor electronics' integrated cable with a 16-pin connection and lateral attachment holes facilitates mechanical installation. The sensor requires just 5 V of electricity, while the actuator system requires only 115 mW (at maximum nominal deflection of 1.5°).
Key Features
- High dynamism with outstanding control behavior up to 1.5 kHz
- Large tilt angle of ±1.5°
- Compact and durable due to voice coil and proprietary sensor technology
- Applies to a wide range of settings, including aerospace, defense, optics, and industry
- Large precision mirror (Ø 20 mm) with high reflectivity for lower optical losses
- High-resolution position measurement < 0.3 µrad
- Proven performance in series use in satellite communication