FRT Metrology

FormFactor FRT Metrology manufactures 3D surface measurement technology for research and production. Our high-precision measuring instruments are based on SurfaceSensTM multi-sensor concept and are equipped with in-house developed software.

The multiple award-winning measuring systems provide (also fully automatically) information about topography, step height, roughness, layer thickness and many other parameters, contact-free and non-destructive. Depending on the application, different measuring methods can be combined with point, line, area and layer thickness sensors and atomic force microscopy in one measuring instrument - measuring ranges can vary from meters to sub-nanometers. Our Hybrid Metrology makes it possible to solve a specific task by measuring with different sensors and then combining the different results to output the desired feature. The FormFactor FRT MicroProf® is well established in semiconductor front end, advanced packaging, MEMS, VCSEL, automotive, engineering and optics. 

FormFactor, Inc. is a leading provider of essential test and measurement technologies along the full IC life cycle – from characterization, modeling, reliability, and design de-bug, to qualification and production test.