At Intersolar North America 2012, Brooks Instrument is all set to launch its new XacTorr CMX0 capacitance manometer, in addition to introducing the new EtherCAT capabilities of its GF40/80 mass flow controller.
The event will take place at San Francisco from July 10 to 12. Other products to be displayed by Brooks at the show include mass flow, pressure and vacuum products for the solar and semiconductor industries.
Considered to be a versatile measuring tool for solar and semiconductor manufacturers, the Brooks XacTorr CMX array of capacitance manometers ensures carrying out repeatable and stable measurements in pressure sensitive processes. In addition to providing 0.15% of reading accuracy, the product provides full-scale ranges from 1,000 Torr to 100 mTorr. The Brooks XacTorr includes a patented Mark IV sensor and has long endurance in aggressive processes. The sensor’s rapid recovery feature enables quick recovery from transformations in pressure, thereby reducing the downtime.
The XacTorr CMX0 provides an unheated option having an accuracy of 0.25% of reading and with same full-scale ranges. It enables drop-in replacement and exceptional diagnostic features for preventative maintenance and scheduled maintenance. Also, monitoring and troubleshooting operations can be achieved using XacTorr CMX0's digital communication protocol.
The GF40/80 is a state-of-the-art user-programmable mass flow controller ideal for use in solar and thin-film processes. Based on MultiFlo technology, the GF40/80 integrates sub 1/sec flow control response time, long-term reliability, unique flow repeatability, and the most comprehensive gas and flow range programmability.
The GF40/80 incorporates EtherCAT, a solution of choice for reputed manufacturers in the solar and microelectronics industries. The EtherCAT protocol simplifies network flow control and other devices enabling efficient diagnostic capabilities and advanced process control.
Source: http://www.brooksinstrument.com/