MKS Debuts Absolute Piezo Vacuum Transducer with Integrated MEMS-Based Piezo Sensor

MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced the 902B Absolute Piezo vacuum transducer which integrates a MEMS-based Piezo sensor with a metal sealed, stainless steel 316 diaphragm and integrated electronics to provide seamless, gas-independent vacuum pressure measurement between 0.1 and 1000 Torr.

902B Absolute Piezo Vacuum Transducer

The 902B transducer provides an economical solution for cost-sensitive applications requiring absolute pressure measurement in many different vacuum process environments.

The robust design and stainless steel construction make the 902B Piezo transducer a cost-effective, highly accurate alternative to conventional transducers, suitable for harsh processes and resistant to damage from air inrush and vibrations. It features up to three setpoint relays, a high bakeout temperature of 100°C, and a reduced process cycle time due to the sensor's fast, accurate and repeatable pressure measurements. The 902B provides ease of operation, with both analog output and digital communication; an optional, integrated display; and multiple analog output emulations. Its compact, single unit design is mountable in any orientation for ease of installation. The 902B replaces existing 902 transducers and is backward compatible for all 902 applications.

The 902B sensor is ideal for a wide range of applications, including semiconductor manufacturing, thin film coatings, vacuum furnaces, freeze-drying, analytical instruments, medical devices, automotive and aerospace.


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